4-axis horizontal multi-joint clean robot GCR4000-PM series
Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.
The GCR4000-PM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. It is possible to choose between base type and flange type according to the equipment layout. It can be equipped with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
- 企業：ジェーイーエル
- 価格：Other
